Characterization

 



 

 Routine in-house techniques available include    

         ● Epitaxial layer thickness by  FTIR

         ● Epitaxial layer doping by mercury probe CV

         ● Surface roughness by AFM

         ● Full-wafer inspection using KLA-Tencor CS

         ● Flatness Measurement by Tropel FlatMaster 200

         ● Nomarski microscopy


                                           



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